Three years ago ST Microelectronics began manufacturing SPAD arrays with different architectures. Currently 5^5 arrays (with each SPAD having active area of 40 ^m and pitch between adjacent pixels of 240 ^m) are produced. Furthermore, technology improvements in terms of quality, QE and cross-talk reduction are under study and development. Figure 3 shows the mask of a 5x5 40 ^m SPAD array and the SEM image.
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