Test Of Plasma Cleaning Results Water drop method

A contaminated sample shows a round water drop on its surface due to surface tensions created in the water by the contaminants. After plasma cleaning there is little or no adhesion on the surface due to the lack of contaminates so no water drop develops and the water simply flows away. End vacuum test:

A cryostat after plasma cleaning reaches a much better end-vacuum after 1 hour of pumping. In our tests, a much lower pressure of 5.0E-5 mbar was obtained after plasma cleaning compared to 1.0E-3 mbar before plasma cleaning.

Mass-spectrometer test:

A mass-spectrum was taken of a sample contaminated with a typical thin film of workshop oil before and after plasma-cleaning. The resulting two spectrums (see Fig. 5) show that most of the lines above masses of 50 amu are reduced significantly. Previous experience shows that unwanted contaminants mainly consist of elements and molecules with masses above 50 amu.

Mass spectrum of plasma cleaning effect

1.NH7

1.NH7

Figure 5. Mass-spectrum of sample before and after plasma-cleaning.

Figure 5. Mass-spectrum of sample before and after plasma-cleaning.

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